200mm探针台
无论应用是器件表征，建模，工艺开发，设计调试或IC失效分析，Cascade 200mm手动和自动探针台可满足最先进的半导体工艺和大规模集成电路测量所需的精度和多功能性。
集成测量系统
FormFactor的IMS产品提供强大的交钥匙功能，让您安心地更快地收集高质量的晶圆在片测量数据，用于当今重要且具有挑战性的测试应用。集成测量系统结合了来自FormFactor合作伙伴的仪器和其他产品，包括Keysight Technologies，以及FormFactor的探测系统、探针和为晶圆在片器件和集成电路提供关键测试数据所需的一切。
大功率探针台
功率半导体器件的广泛使用产生了对功率器件快速高效地进行特性分析的紧迫需求。Cascade 提供了晶圆上功率器件特性分析系统，旨在缩短新型功率器件的上市时间并跟上生产进度的要求。
晶圆/碎片测量系统
Our high-performance cryogenic probe stations for on-wafer and multi-chip measurements support a wide range of challenging applications, including IR-sensor test, radiometric test, DC and RF measurements at cryogenic temperatures. The systems can handle wafers up to 300 mm, and support cold filter, cold shutter and selectable f/value aperture as well as multiple optical instruments like IR radiation sources (black bodies). Up to eight probe positioners and/or a probe card can be integrated. Automatic chip alignment, OCR and wafer mark reading are exclusive features of our fully- and semi-automated systems. Cooling options include liquid helium (LHe), liquid nitrogen (LN2) or cryogen-free cooling. With a large install base of >80 stations worldwide, we bring expertise and technical know-how to provide the right solution for your measurement challenge.
真空/压力系统
Our vacuum and pressure probe stations for on-wafer measurements in a high vacuum or controlled pressure environment enable precise µ-bolometer test (un-cooled IR-FPA), MEMS characterization (inertial MEMS, resonators and RF MEMS, pressure sensors), IV/CV, RF/mmW and Opto measurements. Multiple optical instruments like IR radiation sources (black bodies), and up to eight probe positioners and/or a probe card can be integrated. The high stability design provides excellent contact quality and accurate measurement results in a condensation-free test environment. Step and repeat capability enables high throughput with our semi-automated systems.
定制探针台系统
针对各种挑战性的应用定制的解决方案
